Integrated circuit and layout method for standard cell structures

ABSTRACT

Placement methods described in this disclosure provide placement and routing rules where a system implementing the automatic placement and routing (APR) method arranges standard cell structures in a vertical direction that is perpendicular to the fins but parallel to the cell height. Layout methods described in this disclosure also improve device density and further reduce cell height by incorporating vertical power supply lines into standard cell structures. Pin connections can be used to electrically connect the power supply lines to standard cell structures, thus improving device density and performance. The APR process is also configured to rotate standard cells to optimize device layout.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional application of U.S. Non-provisionalpatent application Ser. No. 16/912,229, titled “Integrated Circuit andLayout Method for Standard Cell Structures,” which was filed on Jun. 25,2020 and issuing as U.S. Pat. No. 11,170,152 on Nov. 9, 2021, which is acontinuation application of U.S. Non-provisional patent application Ser.No. 15/965,358, titled “Integrated Circuit and Layout Method forStandard Cell Structures” and filed on Apr. 27, 2018 and issued as U.S.Pat. No. 10,733,352 on Aug. 4, 2020, which claims the benefit of U.S.Provisional Patent Application No. 62/589,470, titled “IntegratedCircuit and Layout Method for Standard Cell Structures,” which was filedon Nov. 21, 2017, all of which are incorporated herein by reference intheir entireties.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. In semiconductor IC design, standard cellmethodologies are commonly used for the design of semiconductor deviceson a chip. Standard cell methodologies use standard cells as abstractrepresentations of certain functions to integrate millions devices on asingle chip. As ICs continue to scale down, more and more devices areintegrated into the single chip. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the common practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofillustration and discussion.

FIG. 1 is an illustration of an exemplary standard cell layout view thatincorporate one-fin standard cell layout designs and two-fin standardcell layout designs, according to some embodiments.

FIGS. 2 and 3 are illustrations of exemplary placement rules associatedwith one-fin and two-fin standard cell layout designs, according to someembodiments.

FIG. 4 is an illustration of exemplary layout views of a one-finstandard cell structure optimized by incorporating vertical power supplylines, according to some embodiments.

FIG. 5 is a layout view of an exemplary one-fin standard cell inverterdesign incorporating vertical power supply lines, in accordance to someembodiments.

FIG. 6 is a layout view of an exemplary two-fin standard cell inverterdesign incorporating vertical power supply lines, in accordance to someembodiments.

FIG. 7 is a layout view of an exemplary one-fin standard cell inverterdesign incorporating power supply pins, in accordance to someembodiments.

FIG. 8 is a layout view of exemplary standard cell designs incorporatingpower supply pins, in accordance to some embodiments.

FIG. 9 is a layout view of exemplary standard cell designs incorporatingpower supply pins and optimized to shorten metal connection, inaccordance to some embodiments.

FIG. 10 is an illustration of a method for standard cell placement flow,according to some embodiments.

FIG. 11 is an illustration of an exemplary computer system forimplementing various embodiments of the present disclosure, according tosome embodiments.

FIG. 12 is an illustration of a process to form standard cell structuresbased on a graphic database system (GDS) file, according to someembodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over a second feature in the description that followsmay include embodiments in which the first and second features areformed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Asused herein, the formation of a first feature on a second feature meansthe first feature is formed in direct contact with the second feature.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper,” and the like may be used herein for ease of description todescribe one element or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. The spatially relative termsare intended to encompass different orientations of the device in use oroperation in addition to the orientation depicted in the figures. Theapparatus may be otherwise oriented (rotated 90 degrees or at otherorientations) and the spatially relative descriptors used herein maylikewise be interpreted accordingly.

It is noted that references in the specification to “one embodiment,”“an embodiment,” “an example embodiment,” “exemplary,” etc., indicatethat the embodiment described may include a particular feature,structure, or characteristic, but every embodiment may not necessarilyinclude the particular feature, structure, or characteristic. Moreover,such phrases do not necessarily refer to the same embodiment. Further,when a particular feature, structure or characteristic is described inconnection with an embodiment, it would be within the knowledge of oneskilled in the art to effect such feature, structure or characteristicin connection with other embodiments whether or not explicitlydescribed.

It is to be understood that the phraseology or terminology herein is forthe purpose of description and not of limitation, such that theterminology or phraseology of the present specification is to beinterpreted by those skilled in relevant art(s) in light of theteachings herein.

As used herein, the term “about” indicates the value of a given quantitythat can vary based on a particular technology node associated with thesubject semiconductor device. Based on the particular technology node,the term “about” can indicate a value of a given quantity that varieswithin, for example, 10-30% of the value (e.g., ±10%, ±20%, or ±30% ofthe value).

As used herein, the term “substantially” indicates that the value of agiven quantity varies by ±1% to ±5% of the value.

As used herein, the term “substrate” describes a material onto whichsubsequent material layers are added. The substrate itself may bepatterned. Materials added on top of the substrate may be patterned ormay remain unpatterned. Furthermore, the substrate may be a wide arrayof semiconductor materials such as, for example, silicon, germanium,gallium arsenide, indium phosphide, etc. Alternatively, the substratemay be made from an electrically non-conductive material such as, forexample, a glass or a sapphire wafer.

As used herein, the term “p-type” defines a structure, layer, and/orregion as being doped with p-type dopants, such as, for example, boron.

As used herein, the term “n-type” defines a structure, layer, and/orregion as being doped with n-type dopants, such as, for example,phosphorus.

As used herein, the term “critical dimension” refers to the smallestfeature size (e.g., line width) of a finFET and/or an element of anintegrated circuit.

Standard cell structures can incorporate transistor devices such as finfield-effect transistors (finFETs). In some embodiments, the standardcell structures can implement a one-fin layout which includes one p-typefinFET and one n-type finFET. Compared to a two-fin layout whichincludes two p-type finFETs and two n-type finFETs, a one-fin layout isa more compact unit that provides improved layout flexibility andgreater cell density. Standard cell structures usually have the samewidths that are measured in the horizontal direction (e.g., parallel tofins) but have different heights that are measured in the verticaldirection (e.g., perpendicular to fins), depending on the number of finsincluded. Although two-fin standard cell structures provide greaterelectrical drive capability and are used in standard cell structureswhere sufficient electrical drive is needed, using both one-fin andtwo-fin standard cell structures can be challenging because they havedifferent cell heights that can lead to wasted space between adjacentstandard cell structures. Different cell heights can cause difficultiesfor the automatic placement and routing (APR) tools to compact cells,shift cells, and utilize half-row empty spaces. For example, placementand routing methods usually use a horizontal row placement rule whicharranges standard cell structures by shifting them in a horizontaldirection (e.g., in a direction parallel to the fins of finFETs butperpendicular to cell height). However, because cell height differencesare in a vertical direction that is perpendicular to the horizontaldirection, the horizontal row placement rule can create wasted spacebetween adjacent standard cell structures. Standard cell structures alsorequire electrical power supply connections, and when used incombination with mixed cell heights the placement and routing processfor APR can be further challenging.

Novel placement and routing methods described in this disclosure provideplacement and routing rules where the APR tool arranges standard cellstructures in a vertical direction that is perpendicular to the fins butparallel to the cell height. The vertical placement and routing ruleenables the APR tool to arrange the standard cell structures in avertical direction based at least on the cell heights of each standardcell structure. For example, a one-fin standard cell structure may havea half-row gap between itself and an adjacent two-fin standard cellstructure. The APR tool can shift one of the standard cell structures upor down in the vertical direction rather than the horizontal directionto remove the half-row gap while preserving functionalities andconnections of the standard cell structures.

Novel layout methods described in this disclosure also improves devicedensity and further reduces cell height by incorporating vertical powersupply lines into standard cell structures. Vertical power supply linessuch as V_(DD), V_(SS), or ground can be aligned perpendicular to thefins rather than in parallel which can further reduce cell heights.

Novel layout and placement/routing methods described in this disclosurealso include pin connections for providing power supply to standard cellstructures to further improve device density. Pin connections can beinterlayer interconnect vias that provide power supplies to a particularstandard cell structure and can be used alone or in combination withpower supply lines. By replacing some or all of the power supply lineswith pin connections, the number of power supply lines can be reduced.Further, pin connections from adjacent standard cell structures that areconnected to a common power or signal source can be placed close to eachother by selecting specific locations of pin connections within eachstandard cell structure or flipping/rotating standard cell layouts.Placing pin connections close to each other can provide the benefits ofhaving shortened metal connection.

Further, embodiments of the disclosed standard cell structure andplacement/routing methods can be used in the fabrication of devices atvarious process technology nodes, such as 5 nm and 3 nm fabricationprocesses and beyond.

FIG. 1 is an illustration of an exemplary cell layout view thatincorporate one-fin standard cell layout designs and two-fin standardcell layout designs, according to some embodiments. The cell layoutsillustrated in this disclosure can be standard cell layout orcustom-designed cell layouts, from a library of cells. As shown in FIG.1 , integrated circuit 100 includes a few pre-designed circuit blocksalso referred to as standard cells. Integrated circuit 100 can includen-type active region 110 a-110 c, p-type active region 120 a-120 c,power supply lines 130 and 140, one-fin standard cell 150, and two-finstandard cell 160. In some embodiments, the standard cells can becustom-designed cells. For simplicity and clarity purposes, FIG. 1 onlyillustrates cell boundaries of the standard cells, and other componentsof the standard cells are omitted. Integrated circuit 100 can furtherinclude any other suitable structures, for example, vias, conductivelines, dielectric layers, any other suitable structures, and are notshown in FIG. 1 for simplicity. A standard cell structure can includeone or more standard cells from a standard cell library to perform apredetermined function in the integrated circuit, according to someembodiments. A standard cell can be any or all an AND, OR, XOR, XNOR,NAND, inverter, or other suitable logic device. Integrated circuit 100can include n-type active regions and p-type active regions for formingone or more transistors. For example, n-type active regions 110 a-110 cand p-type active regions 120 a-120 c are placed parallel with oneanother and extend in the x-direction, as illustrated in FIG. 1 . Powersupply lines 130 and 140 are used to provide electrical power supply tothe one or more transistors. For example, power line 130 can be aconductive line that provides a supply voltage (V_(SS)) and power line140 can be a conductive line that provides a reference voltage (V_(DD)),in accordance with some embodiments. The power supply lines are alsoplaced parallel with the n-type and p-type active regions and extend inthe x-direction.

A one-fin standard cell can include a portion of an n-type active regionand a portion of a p-type active region to incorporate one n-type finFETand one p-type finFET device. Similarly, a two-fin standard cell caninclude portions of two n-type regions and portions of two p-typeregions to form two n-type finFET devices and two p-type finFET devices.For example, one-fin standard cell 150 can include portions of n-typeactive region 110 b and portions of p-type active region 120 b. Two-finstandard cell 160 can include portions of n-type active regions 110 band 110 c and portions of p-type active regions 120 a and 120 b. Then-type active regions or the p-type active regions can be portions offinFET fins that are doped with n-type or p-type dopants, respectively.A cell boundary is a virtual line that can define cell regions of thestandard cells, and the cell regions of neighboring standard cells donot overlap. For example, one-fin standard cell 150 are placed abuttingtwo-fin standard cell 160 while their cell boundaries do not overlap. Insome embodiments, upper or lower cell boundaries can be defined betweenadjacent active regions and on a power supply line. An upper cellboundary of one-fin standard cell 150 as viewed in figures of thepresent disclosure extends along the X direction and is defined in themiddle of a portion of power line 130. As shown in FIG. 1 , the Xdirection is defined as perpendicular to the longer side of two-finstandard cell 160. A lower cell boundary of one-fin standard cell 150also extends along the X direction and is defined in the middle of aportion of power line 140. In some embodiments, the upper and lower cellboundaries of standard cells can be defined between adjacent activeregions but not on a power supply line. For example, an upper cellboundary of two-fin standard cell 160 extends along the X direction andis defined between n-type active region 110 a and p-type active region120 a, while a lower cell boundary of two-fin standard cell 160 alsoextends along the X direction and is defined between n-type activeregion 110 c and p-type active region 120 c. The boundary of two-finstandard cell 160 encapsulates portions of power supply lines 130 and140. In some embodiments, a standard cell can have one of the upper andlower boundaries defined on a power line and the other one defined off apower line. In some embodiments, a standard cell can have both upper andlower boundaries defined on or off the power lines. A standard cell hasa cell height along the Y direction. Cell height is defined as adistance between the upper and lower cell boundaries. For example,one-fin standard cell 150 has a cell height H₁ and two-fin standard cell160 has a cell height H₂, defined between their respective upper andlower cell boundaries. In some embodiments, a one-fin standard cellincludes a portion of an n-type active region and a portion of a p-typeactive region while a two-fin standard cell can include portions of twon-type regions and portions of two p-type regions, the cell height of atwo-fin standard cell can be greater than the cell height of a one-finstandard cell. For example, cell height H₂ of two-fin standard cell 160is greater than cell height H₁ of one-fin standard cell 150. In someembodiments, cell height H₂ can be about two times the size of cellheight H₁. In some embodiments, height H₂ can be about 1.5 to about 2.5times the size of cell height H₁. A standard cell has a cell width alongthe X direction, which is defined as a distance between its left andright cell boundaries. In some embodiments, standard cells can havedifferent widths. In some embodiments, standard cells can have similarwidths. For example, one-fin standard cell 150 and two-fin standard cell160 can have similar widths.

FIG. 2 illustrates exemplary rows of cells that are arranged using ahorizontal row placement rule, according to some embodiments. The rowsof cells illustrated in FIG. 2 can be a portion of integrated circuit200 that includes at least two-fin standard cells 210 a-210 c andone-fin standard cells 220 a-220 b. In some embodiments, the standardcells can be selected from a library of cells. In some embodiments, thestandard cells can be custom-designed cells. For simplicity and claritypurposes, FIG. 2 only illustrates cell boundaries of the standard cells,and other components of the standard cells and integrated circuits areomitted. For example, integrated circuit 200 can include power lines,n-type and/or p-type active regions, vias, conductive lines, dielectriclayers, any other suitable structures, and are not shown in FIG. 2 .Horizontal rows 230 a-230 d extend in the X direction and are virtualconstraints used by an APR process to arrange standard cells in a layoutdesign process. Each horizontal row is placed parallel with and abuttinganother adjacent horizontal row. A layout design system implementing theAPR process can select standard cell designs from the cell library andarrange them in the horizontal rows according to various design rulesand check for potential cell-to-cell arrangement violations. In someembodiments, a cell may occupy a single horizontal row. In someembodiments, a cell may occupy more than one horizontal row. The APRprocess can identify different standard cell layouts such as one-finstandard cells and two-fin standard cells or other cells and arrangethem using a horizontal placement rule. For example, the APR process canidentify the standard cells by their predetermined functions or by thenumber of fins included in a standard cell, and move them in the Xdirection along the horizontal rows according to the placement rules andwithout violating cell-to-cell arrangement rules.

The horizontal row placement rule presents a number of challenges forcells with different heights because the differences between cellheights can form half-row gaps between their cell boundaries and theadjacent boundaries of the horizontal rows. Half-row gaps createsundesirable empty device space and prevents implementation of compactintegrated circuit designs. Half-row gaps can also exacerbate the“ripple effect” where shifting a cell along the horizontal direction canrequire multiple adjacent cells to relocate. In some embodiments, rowheights of the horizontal rows are measured in the Y direction and canbe about the same as cell height H₁ of a one-fin standard cell. In someembodiments, row heights can be different from cell heights, forexample, row heights can be slightly greater or less than cell heights.As shown in in FIG. 2 , row heights for horizontal rows 230 a-230 d areabout the same as cell heights of one-fin standard cells 220 a-220 b. Insome embodiments, cell heights of two-fin standard cells 210 a-210 c canbe about two times the cell heights for one-fin standard cells and wouldtherefore occupy more than one horizontal row. For example, two-finstandard cell 210 a can occupy two horizontal rows 230 b and 230 c. Atwo-fin standard cell can also occupy three horizontal rows and itsupper and/or lower cell boundary would be placed in the middle of thehorizontal rows, leaving half-row gaps between the cell boundaries andtheir respective adjacent boundaries of the horizontal rows. Two-finstandard cell 210 b and 210 c occupy three horizontal rows 230 b-230 dand 230 a-230 c, respectively, and half-row gaps 251-254 are formedbetween their upper/lower cell boundaries and their respective adjacenthorizontal rows. Half-row gap 254 formed between two-fin standard cell210 c and one-fin standard cell 220 b may not provide sufficient devicespace for the APR process to place another standard cell, thus creatingundesirable wasted device space. In some embodiments, if the APR processis programmed to move two-fin standard cell 210 b to the right along thehorizontal placement direction (i.e., the X direction), the relocationwould also require moving two-fin standard cell 210 c and one-finstandard cells 220 a-220 b, causing the “ripple effect.”

FIG. 3 illustrates exemplary rows of cells that are arranged using avertical row placement rule, according to some embodiments. Under avertical row placement rule, a layout design system implementing the APRprocess can arrange standard cell structures in a vertical directionthat is parallel to the cell height (i.e., Y direction). The verticalplacement and routing rule enables the APR process to arrange thestandard cell structures in a vertical direction based at least on thecell heights of each standard cell structure to reduce or eliminatehalf-row gaps. For example, a one-fin standard cell structure may have ahalf-row gap between itself and an adjacent two-fin standard cellstructure. The APR process can shift one of the standard cell structuresup or down in the vertical direction rather than the horizontaldirection such that adjacent standard cells abut each other, andtherefore eliminate the half-row gap while preserving functionalitiesand connections of the standard cell structures.

Rows of cells illustrated in FIG. 3 can be a portion of integratedcircuit 300 that includes at least two-fin standard cells 310 a-310 cand one-fin standard cells 320 a-320 b. In some embodiments, thestandard cells can be selected from a library of cells. In someembodiments, the standard cells can be custom-designed cells. Forsimplicity and clarity purposes, FIG. 3 only illustrates cell boundariesof the standard cells, and other components of the standard cells andintegrated circuits are omitted. Similar to the integrated circuitdescribed above in FIG. 2 , integrated circuit 300 can include powerlines, n-type and/or p-type active regions, vias, conductive lines,dielectric layers, any other suitable structures, and are not shown inFIG. 3 . Vertical rows 330 a-330 d extend in the Y direction and arevirtual constraints used by an APR process to arrange standard cells ina layout design process. Each vertical row is placed parallel with andabutting another adjacent vertical row. A layout design systemimplementing the vertical row placement process can select standard celldesigns from the cell library and arrange them in the vertical rowsaccording to various design rules and check for potential cell-to-cellarrangement violations or design-rule-check (DRC) rules. The APR processcan identify different standard cell layouts such as one-fin standardcells and two-fin standard cells or other cells and arrange them using avertical placement rule to avoid forming gaps between adjacent cells.For example, a layout design system implementing the APR process canidentify the standard cells by various categories such as their cellheights, predetermined functions or by the number of fins included in astandard cell, and move them in the Y direction within the vertical rowsto eliminate any undesirable empty device spaces without violatingcell-to-cell arrangement rules. For example, half-row gap 254 in FIG. 2that is formed between one-fin standard cell 220 b and two-fin standardcell 210 c due to different cell heights (e.g., H₁ and H₂) can beeliminated by shifting either one-fin standard cell 220 b or two-finstandard cell 210 c or both in the Y direction. One-fin standard cell220 b and two-fin standard cell 210 c abut each other in the Y directionafter shifting.

FIG. 4 illustrates an exemplary cell layout design that implementsvertical power supply lines, according to some embodiments. FIG. 4illustrates integrated circuit 400 which includes a standard cell 402that incorporates vertical power lines. By replacing horizontal powerlines that are parallel with the n-type or p-type active regions withvertical power lines, the cell heights can be reduced and in turnprovides the benefits of device density improvement.

Integrated circuit 400 can include n-type active region 411, p-typeactive region 421, power supply lines 431 and 441 that are perpendicularto the active regions. For simplicity and clarity purposes, FIG. 4 onlyillustrates cell boundaries of the standard cells, and other componentsof the standard cells are omitted. Integrated circuit 400 can furtherinclude any other suitable structures, for example, vias, conductivelines, dielectric layers, any other suitable structures, and are notshown in FIG. 4 for simplicity. N-type active region 411 and p-typeactive region 421 can be fins for n-type or p-type finFETs devices. Insome embodiments, the standard cells can be custom-designed cells.Similar to power supply lines 130 and 140, power supply lines 431 and441 are used to provide electrical power supply to the one or moretransistors. For example, power line 431 can be V_(SS) supply and powerline 441 can be V_(DD) supply, in accordance with some embodiments.Power supply lines 431 and 441 can be electrically connected to n-typeactive region 411 or p-type active region 421, for example, power supplyline 431 can be electrically connected to n-type active region 411 andpower supply line 441 can be electrically connected to p-type activeregion 421. In the cell layout design in FIG. 4 , the power supply linesare perpendicular to n-type active region 411 or p-type active region421. The upper and lower cell boundaries of one-fin standard cell 450extends along the X direction, however, since power lines areperpendicular to the n-type or p-type active regions, the upper or lowercell boundary no longer needs to be determined by the locations of thepower lines. Rather, the upper cell boundary can be defined above thep-type active region 421 by a nominal distance if needed. A nominaldistance can be any distance suitable for defining a cell boundary. Thenominal distance can depend on the specific cell design; for example,the nominal distance can be defined closer to the p-type or n-typeactive regions to achieve a smaller cell area. Similarly, the lower cellboundary can be defined below the n-type active region 411 by a nominaldistance if needed. Therefore, cell height H₃ of one-fin standard cell450 can be less than cell height H₁ of one-fin standard cell 150 asdescribed in FIG. 1 which includes upper and lower cell boundariesdefined in the middle of power supply lines.

FIG. 5 illustrates an exemplary inverter cell layout design thatimplements vertical power supply lines and includes a one-fin standardcell, according to some embodiments. Integrated circuit 500 can includea one-fin standard cell 502. Also shown in FIG. 5 are n-type activeregion 511, p-type active region 521, metal source/drain (S/D) contacts(labelled as MD in FIGS. 5 ) 512 and 522, power supply lines 531 and 541that are perpendicular to the active regions, VIA0 structures 532 and542, gate structure 561, VIA gate/MD structures 575-577, and M0conductive lines 571 and 572. Integrated circuit 500 can also includeother structures such as vias, conductive lines, dielectric layers, anyother suitable structures, and are not shown in FIG. 5 for simplicityand clarity purposes. As shown in FIG. 5 , vertical power supply lines531 and 541 are perpendicular to the n-type and p-type active regions,and the upper and lower cell boundaries of one-fin standard cell 502 canextend above or below p-type region or n-type region without the need todepend on the locations of the power supply lines. Rather, in someembodiments, the left and/or right cell boundaries can include portionsof the power supply lines as shown in FIG. 5 . In some embodiments, theleft and/or right cell boundaries overlap the middle of the power supplylines. By replacing horizontal power lines that are parallel with then-type or p-type active regions with vertical power lines 531 and 541,cell height of one-fin standard cell 502 can be reduced and in turnprovides the benefits of device density improvement.

Metal S/D contacts 512 and 522 can provide electrical connection to oneor more n-type and/or p-type active regions. M0 conductive lines 571 and572 can be metal lines in a metal 0 layer of a back-end-of-line (BEOL)interconnect structure. M0 conductive lines can be local interconnectsthat represent a first interconnect level and electrically connect to anunderlying semiconductor device through one or more vias. For example,as shown in FIG. 5 , M0 conductive line 571 is connected to metal S/Dcontacts 512 and 522 through VIA gate/MD structures 575 and 576,respectively. M0 conductive line 572 is connected to gate structure 561through VIA gate/MD 577. In some embodiments, gate structure 561 can begate structure of transistor devices such as, for example, finfield-effect transistors (FinFETs), planar transistors, and/or othersuitable transistors. Power supply lines can be electrically connectedto the n-type or p-type active regions through VIA0 structures. Forexample, power supply line 531 can be connected to n-type active region511 through VIA0 532, and power supply line 541 can be connected p-typeactive region 521 through VIA0 542.

FIG. 6 illustrates an exemplary inverter cell layout design thatimplements vertical power supply lines and includes a two-fin standardcell, according to some embodiments. Integrated circuit 600 can includea two-fin standard cell 602. Also shown in FIG. 6 are n-type activeregions 611 a-611 b, p-type active regions 621 a-621 b, metal S/Dcontacts 612 and 622, power supply lines 631 and 641 that areperpendicular to the active regions, VIA0 structures 632 a-632 b and 642a-642 b, gate structure 661, VIA gate/MD structures 675-677, M0conductive lines 671 and 672. In some embodiments, the circuitcomponents and configurations shown in FIG. 6 can be similar to thecorresponding circuit components and configurations shown in FIG. 5 andare not described here in detail. In some embodiments, the correspondingcircuit components and configurations between FIGS. 5 and 6 can bedifferent, depending on device design and needs. By replacing horizontalpower lines that are parallel with the n-type or p-type active regionswith vertical power lines 631 and 641, cell height of two-fin standardcell 602 can be reduced and in turn provides the benefits of devicedensity improvement. In some embodiments, the vertical power lineconfiguration can be applied to custom-designed cells or cells in anysuitable technology node.

FIG. 7 illustrates an exemplary cell layout design that implementsvertical power supply lines, according to some embodiments. FIG. 7illustrates integrated circuit 700 which includes a one-fin standardcell 702 that incorporates pin connections for providing power supply tostandard cell structures to further improve device density. Pinconnections can be interlayer interconnect vias that provide powersupplies to a particular standard cell structure and can be used aloneor in combination with power supply lines. By replacing some or all ofthe power supply lines with pin connections, the number of power supplylines can be reduced.

Integrated circuit 700 can include n-type active region 711, p-typeactive region 721, metal S/D contacts (labelled as MD in FIGS. 7 ) 712and 722, power supply pins 734 and 744, gate structure 761, VIA gate/MDstructures 775-777, and M0 conductive lines 771 and 772. Integratedcircuit 700 can also include other structures such as other vias,conductive lines, dielectric layers, any other suitable structures, andare not shown in FIG. 7 for simplicity and clarity purposes. Powersupply pins 734 and 744 are used to provide electrical power supply tothe one or more transistors. For example, power supply pins can beconnected to power supply lines formed in one of the metal layers (e.g.,M0, M1, etc.) of a BEOL interconnect structure through one or more vias,in accordance with some embodiments. In some embodiments, power supplypins 734 and 744 can be formed in the same level as the VIA gate/MD inthe BEOL interconnect structure. Similar to the cell layout design inFIG. 6 , the cell layout design for one-fin standard cell 702 caninclude upper and/or lower cell boundaries that do not electricallyconnect to power supply lines. Rather, the upper cell boundary can bedefined above the p-type active region 721 by a nominal distance ifneeded. Similarly, the lower cell boundary can be defined below then-type active region 711 by a nominal distance if needed. Therefore,cell height of one-fin standard cell 702 can also be less than cellheight of one-fin standard cell 150 as described in FIG. 1 , whichincludes upper and lower cell boundaries defined in the middle of powersupply lines. Further, by replacing some or all of the power supplylines with pin connections, the number of power supply lines can bereduced to provide more device space for incorporating additionalcircuit components in standard cells or to provide a more compactstandard cell layout design. A layout design tool implementing the APRprocess can arrange and electrically connect power supply pins to achip-level power supply plan. In addition, a standard cell incorporatingthe power supply pin configuration can also be arranged according to thevertical row placement rule during an APR process.

FIG. 8 illustrates exemplary rows of cells that are arranged using avertical row placement rule and incorporating aligned power supply pins,according to some embodiments. Under a vertical row placement rule, alayout design system implementing the APR process can arrange or movestandard cell structures in a vertical direction that is parallel to thecell height to optimize device layout. In addition, the power supplypins can also be aligned during an APR process to provide benefits suchas, to name a few, shorter metal connections, more compact devicedesigns, no additional steps in the fabrication process, and more.

FIG. 8 illustrates integrated circuit 800 that includes cells 810 a-810b, 820, and 825. Standard cells 810 a-810 b are two-fin standard cells,standard cell 820 is a one-fin standard cell, while standard cell 825 isa custom-designed cell that includes portions of one n-type activeregion and two p-type active regions. Also shown in FIG. 8 are n-typeactive regions 811 a-811 d, p-type active regions 821 a-821 d, verticalrows 830 a-830 b, power supply lines 831 a-831 b that are perpendicularto the active regions, virtual grid lines 833 a-833 d, power supply pins871 a-871 d, 873 a-873 b, 875 a-875 d, 877 a-877 c, VIA0 872 a-872 b,874, 876 a-876 b, 878 a-878 b, VIA1 882 a-882 b, M2 conductive line 881,and VIA1 882 a-882 b. Circuit components and configurations shown inFIG. 8 that can be similar to the corresponding circuit components andconfigurations shown in FIG. 7 are not described here in detail.Integrated circuit 800 can also include other structures, such as othervias, conductive lines, dielectric layers, any other suitablestructures, and are not shown in FIG. 8 for simplicity and claritypurposes.

In some embodiments, power supply pins 871 a-871 d, 873 a-873 b, 875a-875 d can be formed on the same level as VIA gate/MD of a BEOLinterconnect structure. Power supply lines 831 a-831 b can be conductivelines that provide V_(SS) or V_(DD) power supply, in accordance withsome embodiments. Power supply lines 831 a-831 b can be connected topower supply pins of standard cells 810 a-810 b, 820, and 825 throughVIA0 structures. In some embodiments, power supply lines 831 a-831 b canbe incorporated in the M1 metal layer of a BEOL interconnect structure.M2 conductive line 881 can be formed above the M1 metal layer and usedto connect power supply lines 831 a-831 b. In some embodiments, M2conductive line 881 can be a conductive metal line in a metal layer ofthe BEOL interconnect structure. For example, M2 conductive lines can belocal interconnects that represent a third interconnect level—above thefirst and second interconnect levels—and electrically connects to one ormore underlying M1 metal lines through one or more vias. M2 conductiveline 881 can electrically connect power supply lines 831 a-831 b throughVIA1 882 a-882 b.

A layout design system implementing the APR process can identify thepower connections of different standard cell layouts and arrange themsuch that power connections requiring the same power input are alignedon one of the virtual grid lines 833 a-833 d. In addition, standardcells of the library of cells can be designed such that their powerconnections are placed in locations that provides convenience when theAPR process is operating to align the corresponding power connections.Using the standard cells illustrated in FIG. 8 as an example, powersupply pins 871 a-871 b, 873 b, 875 c-875 d, 877 a-877 b require thesame type of power supply, e.g., power supply lines such as V_(DD),V_(SS), or ground. The APR process can align 871 a-871 b and 873 b onvirtual grid line 833 b and 875 c-875 d, 877 a-877 b on virtual gridline 833 d. Because these power supply pins can be aligned in a straightline, power supply lines such as 831 a and 831 b can also be formed instraight lines which can minimize device footprint and in turn providethe benefits such as shorter metal connections, more compact devicedesigns, and no additional steps in the fabrication.

FIG. 9 illustrates exemplary rows of cells that are arranged using avertical row placement rule and arranged to minimize metal connectionlengths to provide a further compact integrated circuit, according tosome embodiments.

A layout design system implementing the APR process can identifydifferent standard cell layouts such as one-fin standard cells andtwo-fin standard cells or other cells and identify their powerconnection preference and/or requirements. The APR process can beconfigured to identify characteristics and features of an integratedcircuit implementing standard cells, including but not limited to,standard cells functions, dimensions, locations of power connections,and other suitable features. Based on the features and configurations ofthe standard cells, the layout design system implementing the APRprocess can rotate standard cells to optimize device layout, in additionto arranging them under vertical or horizontal row placement rules.

In some embodiments, the layout design system implementing the APRprocess can analyze the integrated circuit 800 described in FIG. 8 andidentify the characteristics of the standard cells such as theirlocations and configurations. For example, the layout design system canidentify at least the location, function, connections, locations of theconnections, of two-fin standard cells 810 a-810 b, one-fin standardcell 820, and custom-designed cell 825. The layout design system canoptimize the locations and placements of standard cells by arranging orrotating the standard cell layouts to further reduce lengths of metalline connections to further minimize device footprint. For example, byidentifying power connections (and/or their locations in the layoutdesign) to standard cells such as power supply pins, power supply lines,and M1 conductive line illustrated in FIG. 8 , the layout design systemimplementing the APR process can rotate standard cells 825 and 810 balong a virtual grid line 935 extending along the Y direction(represented by a dotted line in FIG. 9 that marks the axis of symmetryof vertical row 830 b or the standard cells placed in vertical row 830b) by 180° to form standard cells 925 and 910 b, as shown in FIG. 9 . Inother words, the standard cells are “flipped.” The length of M1conductive line that is used to electrically connect power supply linescan be reduced because the power supply lines 831 a and 831 b are placedcloser to each other after the standard cell rotation. M1 conductiveline 981 which electrically connects power supply lines 831 a and 831 bthrough VIA1 982 a and 982 b can have a length along the X directionthat is shorter compared to the length of M1 conductive line 881illustrated in FIG. 8 . In addition, the APR process can place specificcomponents of the standard cells at locations within the standard cellssuch that routing can be shortened between these specific components.For example, the APR process can align locations of respective power pinconnectors 877 a and 876 a in standard cells 925 and 910 b in a straightline, such that power supply line 831 b that electrically connect thesetwo power pin connectors is a straight line and without turns, thereforeminimizing the length of the power supply line.

FIG. 10 is an illustration of a method 1000 for optimizing standard celllayout designs in integrated circuits, according to some embodiments.Operations of method 1000 can also be performed in a different orderand/or vary. Variations of method 1000 should also be within the scopeof the present disclosure.

At operation 1002, a layout design system that implements the APRprocess arranges the standard cell structures in a vertical directionbased at least on the cell heights of each standard cell structure toreduce or eliminate half-row gaps. For example, a one-fin standard cellstructure may have a half-row gap between itself and an adjacent two-finstandard cell structure. The APR process can shift one of the standardcell structures up or down in the vertical direction rather than thehorizontal direction to eliminate the half-row gap while preservingfunctionalities and connections of the standard cell structures.

At operation 1004, a layout design system that implements the APRprocess scans the circuit layout design to determine standard cells thatneed to be optimized. In some embodiments, the conductive lines betweenstandard cells are checked, and standard cells with undesirably longconductive lines and/or with undesirable gaps between adjacent standardcells are selected to be optimized. In some embodiments, the standardcells are selected according to certain criteria, e.g., criteria fordetermining whether a conductive line is too long and/or separationbetween standard cells is too large. The standard cells can be anycustom-designed cells, or any standard cell in the APR database or celllibrary, e.g., standard cells described above in FIGS. 1-9 .

At operation 1006, a layout design system implementing the APR processcan identify the power connections of different standard cell layoutsand arrange them such that power connections requiring the same powerinput are aligned. In some embodiments, the power connections arealigned on a virtual grid line that is parallel with the vertical rowsfor cell placement. Because these power supply pins can be aligned in astraight line, power supply lines can also be formed in straight lineswhich minimizes device footprint and in turn provide the benefits suchas shorter metal connections, less parasitic capacitances, more compactdevice designs, no additional steps in the fabrication, to name a few.Examples of aligned power supply pins can be power supply pins 871 a-871b, 873 b, 875 c-875 d, 877 a-877 b described above in FIG. 8 . Inaddition, standard cells of the library of cells can be designed suchthat their power connections are placed in locations that providesconvenience when the APR process is operating to align the correspondingpower connections. In some embodiments, child cells can be generatedwhen a standard cell is rotated or “flipped” to reduce conductive linelengths.

A layout design system implementing the APR process can also identifydifferent standard cell layouts and identify their power connectionpreference and/or requirements. Based on the features and configurationsof the standard cells, the layout design system implementing the APRprocess can rotate standard cells to optimize device layout, such asreducing the length of conductive lines, in addition to arranging themunder vertical or horizontal row placement rules. Examples of rotatedand moved standard cells can be standard cells described above in FIG. 9.

The arrangement of the standard cells is in accordance withdesign-rule-check (DRC) rules. In some embodiments, before standardcells are placed, it is determined that whether it is possible to rotateor move the selected standard cells without violating the spacing rulesand/or DRC rules. In some embodiments, DRC rules includes spacing rulesof avoiding cell boundary overlap. In some embodiments, standard cellsare arranged to shorten conductive line length. In some embodiments,standard cells are arranged to remove undesirable empty space betweenadjacent standard cells. The arrangements are consistent with anyapplicable DRC rules.

At operation 1008, the optimized layout design including one or morestandard cells can be identified as child cells or modules and stored ina new cell library. In some embodiments, child cells can be generated byrotating existing standard cells and storing the rotated standard cellin a new library for future use. In some embodiments, a number ofoptimized standard cells can be stored as child cells.

FIG. 11 is an illustration of an exemplary computer system 1100 in whichvarious embodiments of the present disclosure can be implemented,according to some embodiments. Computer system 1100 can be anywell-known computer capable of performing the functions and operationsdescribed herein. For example, and without limitation, computer system1100 can be capable of selecting standard cells to be optimized andplacing metal cuts at desired locations in the standard cells, forexample, an EDA tool. Computer system 1100 can be used, for example, toexecute one or more operations in method 1000.

Computer system 1100 includes one or more processors (also calledcentral processing units, or CPUs), such as a processor 1104. Processor1104 is connected to a communication infrastructure or bus 1106.Computer system 1100 also includes input/output device(s) 1103, such asmonitors, keyboards, pointing devices, etc., that communicate withcommunication infrastructure or bus 1106 through input/outputinterface(s) 1102. An EDA tool can receive instructions to implementfunctions and operations described herein—e.g., method 1000 of FIG. 10—via input/output device(s) 1103. Computer system 1100 also includes amain or primary memory 1108, such as random access memory (RAM). Mainmemory 1108 can include one or more levels of cache. Main memory 1108has stored therein control logic (e.g., computer software) and/or data.In some embodiments, the control logic (e.g., computer software) and/ordata can include one or more of the operations described above withrespect to method 1000 of FIG. 10 .

Computer system 1000 can also include one or more secondary storagedevices or memory 1110. Secondary memory 1110 can include, for example,a hard disk drive 1112 and/or a removable storage device or drive 1114.Removable storage drive 1114 can be a floppy disk drive, a magnetic tapedrive, a compact disk drive, an optical storage device, tape backupdevice, and/or any other storage device/drive.

Removable storage drive 1114 can interact with a removable storage unit1118. Removable storage unit 1118 includes a computer usable or readablestorage device having stored thereon computer software (control logic)and/or data. Removable storage unit 1118 can be a floppy disk, magnetictape, compact disk, DVD, optical storage disk, and/any other computerdata storage device. Removable storage drive 1114 reads from and/orwrites to removable storage unit 1118.

According to some embodiments, secondary memory 1110 can include othermeans, instrumentalities or other approaches for allowing computerprograms and/or other instructions and/or data to be accessed bycomputer system 1100. Such means, instrumentalities or other approachescan include, for example, a removable storage unit 1122 and an interface1120. Examples of the removable storage unit 1122 and the interface 1120can include a program cartridge and cartridge interface (such as thatfound in video game devices), a removable memory chip (such as an EPROMor PROM) and associated socket, a memory stick and USB port, a memorycard and associated memory card slot, and/or any other removable storageunit and associated interface. In some embodiments, secondary memory1110, removable storage unit 1118, and/or removable storage unit 1122can include one or more of the operations described above with respectto method 1000 of FIG. 10 .

Computer system 1100 can further include a communication or networkinterface 1124. Communication interface 1124 enables computer system1100 to communicate and interact with any combination of remote devices,remote networks, remote entities, etc. (individually and collectivelyreferenced by reference number 1128). For example, communicationinterface 1124 can allow computer system 1100 to communicate with remotedevices 1128 over communications path 1126, which can be wired and/orwireless, and which can include any combination of LANs, WANs, theInternet, etc. Control logic and/or data can be transmitted to and fromcomputer system 1100 via communication path 1126.

The operations in the preceding embodiments can be implemented in a widevariety of configurations and architectures. Therefore, some or all ofthe operations in the preceding embodiments—e.g., method 1100 of FIG. 10and method 1200 of FIG. 12 (described below)—can be performed inhardware, in software or both. In some embodiments, a tangible apparatusor article of manufacture comprising a tangible computer useable orreadable medium having control logic (software) stored thereon is alsoreferred to herein as a computer program product or program storagedevice. This includes, but is not limited to, computer system 1100, mainmemory 1108, secondary memory 1110 and removable storage units 1118 and1122, as well as tangible articles of manufacture embodying anycombination of the foregoing. Such control logic, when executed by oneor more data processing devices (such as computer system 1100), causessuch data processing devices to operate as described herein. In someembodiments, computer system 1100 is installed with software to performoperations in the manufacturing of photomasks and circuits, asillustrated in method 1200 of FIG. 12 (described below). In someembodiments, computer system 1100 includes hardware/equipment for themanufacturing of photomasks and circuit fabrication. For example, thehardware/equipment can be connected to or be part of element 1128(remote device(s), network(s), entity(ies)) of computer system 1100.

FIG. 12 is an illustration of an exemplary method 1200 for circuitfabrication, according to some embodiments. Operations of method 1200can also be performed in a different order and/or vary. Variations ofmethod 1200 should also be within the scope of the present disclosure.

In operation 1201, a GDS file is provided. The GDS file can be generatedby an EDA tool and contain the standard cell structures that havealready been optimized using the disclosed method. The operationdepicted in 1201 can be performed by, for example, an EDA tool thatoperates on a computer system, such as computer system 1100 describedabove.

In operation 1202, photomasks are formed based on the GDS file. In someembodiments, the GDS file provided in operation 1201 is taken to atape-out operation to generate photomasks for fabricating one or moreintegrated circuits. In some embodiments, a circuit layout included inthe GDS file can be read and transferred onto a quartz or glasssubstrate to form opaque patterns that correspond to the circuit layout.The opaque patterns can be made of, for example, chromium or othersuitable metals. Operation 1202 can be performed by a photomaskmanufacturer, where the circuit layout is read using a suitable software(e.g., EDA tool) and the circuit layout is transferred onto a substrateusing a suitable printing/deposition tool. The photomasks reflect thecircuit layout/features included in the GDS file.

In operation 1203, one or more circuits are formed based on thephotomasks generated in operation 1202. In some embodiments, thephotomasks are used to form patterns/structures of the circuit containedin the GDS file. In some embodiments, various fabrication tools (e.g.,photolithography equipment, deposition equipment, and etching equipment)are used to form features of the one or more circuits.

Automatic placement and routing methods described in this disclosureprovide placement and routing rules where a system implementing the APRmethod arranges standard cell structures in a vertical direction that isperpendicular to the fins but parallel to the cell height. The systemcan shift one of the standard cell structures up or down in the verticaldirection rather than the horizontal direction to remove the half-rowgap while preserving functionalities and connections of the standardcell structures. Layout methods described in this disclosure alsoimproves device density and further reduces cell height by incorporatingvertical power supply lines into standard cell structures. Layout andplacement/routing methods described in this disclosure also include pinconnections for providing power supply to standard cell structures forfurther improving device density and performance. Pin connections can beinterlayer interconnect vias that provide power supplies to a particularstandard cell structure and can be used alone or in combination withpower supply lines. By replacing some or all of the power supply lineswith pin connections, the number of power supply lines can be reduced.Further, pin connections from adjacent standard cell structures that areconnected to a common power or signal source can be aligned and placedclose to each other by selecting specific locations of pin connectionswithin each standard cell structure or flipping/rotating standard celllayouts. Placing pin connections close to each other can provide thebenefits of having shortened metal connection which in turns providesbenefits such as, for example, shorter metal connections, less parasiticcapacitances, more compact device designs, no additional steps in thefabrication, to name a few.

In some embodiments, a method of placing and routing standard cellstructures include determining first and second directions of aplurality of standard cell structures. The first and second directionsare perpendicular to each other. The method also includes determininglocations of a plurality of power supply lines and the plurality ofpower supply lines extend along the second direction and provideelectrical supply to the plurality of standard cell structures. Themethod further includes determining a first height of a first standardcell structure and a second height of a second standard cell structureof the plurality of standard cell structures. The first and secondheights are measured in the second direction and are different from eachother. The method further includes arranging at least one of the firstand second standard cell structures in the second direction.

In some embodiments, a standard cell structure includes a first finfield-effect transistor (finFET) having a first fin that includes afirst source/drain contact formed on the first fin. The standard cellstructure also includes a second finFET having a second fin. The secondfin includes a second source/drain contact formed on the second fin. Thefirst and second fins are parallel with each other. The standard cellstructure further includes a first power supply line perpendicular tothe first or second fin.

In some embodiments, a method of placing and routing standard cellstructures includes determining a first location for a first pinconnector of a first standard cell structure. The first standard cellstructure includes a first portion of an active region that extendsalong a direction. The first pin connector is electrically connected tothe active region. The method also includes determining a secondlocation for a second pin connector of a second standard cell structure.The second standard cell structure includes a second portion of activeregion extending along the direction. The second pin connector iselectrically connected to the active region. The method further includesdetermining a third location for a third pin connector of a thirdstandard cell structure such that a power supply line electricallyconnecting the second and third pin connectors is perpendicular to thedirection. The method also includes performing an action on at least oneof the first and second standard cell structures along the directionsuch that a distance between the first and second locations is reduced.

It is to be appreciated that the Detailed Description section, and notthe Abstract of the Disclosure, is intended to be used to interpret theclaims. The Abstract of the Disclosure section may set forth one or morebut not all exemplary embodiments contemplated and thus, are notintended to be limiting to the subjoined claims.

The foregoing disclosure outlines features of several embodiments sothat those skilled in the art may better understand the aspects of thepresent disclosure. Those skilled in the art will appreciate that theymay readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodimentsintroduced herein. Those skilled in the art will also realize that suchequivalent constructions do not depart from the spirit and scope of thepresent disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the subjoined claims.

What is claimed is:
 1. A method of placing and routing standard cells,the method comprising: determining a first location for a first pinconnector of a first standard cell, wherein the first standard cellcomprises a first portion of an active region extending along ahorizontal direction and the first pin connector is electricallyconnected to the active region; determining a second location for asecond pin connector of a second standard cell, wherein the secondstandard cell comprises a second portion of the active region extendingalong the horizontal direction and the second pin connector iselectrically connected to the active region; determining a thirdlocation for a third pin connector of a third standard cell, wherein apower supply line electrically connecting the first and third pinconnectors extends in a vertical direction; and reducing a distancebetween the first and second locations, wherein reducing the distancecomprises performing an action on at least one of the first and secondstandard cells.
 2. The method of claim 1, further comprising reducing another distance between the first and third locations, wherein reducingthe other distance comprises performing an other action on the thirdstandard cell.
 3. The method of claim 2, wherein performing the otheraction comprises changing the third location of the third standard cellalong the vertical direction.
 4. The method of claim 1, whereinperforming the action comprises rotating the first standard cell aroundan axis of symmetry of the first standard cell.
 5. The method of claim1, wherein performing the action comprises rotating the second standardcell around an axis of symmetry of the second standard cell.
 6. Themethod of claim 1, wherein the first and second portions of the activeregion are connected and extend in the horizontal direction.
 7. Themethod of claim 1, further comprising determining a gap between thefirst and third standard cells, wherein the gap has a gap heightextending along the vertical direction.
 8. The method of claim 7,further comprising changing the third location of the third standardcell along the vertical direction to abut the first and third standardcells in the vertical direction.
 9. The method of claim 7, furthercomprising changing the third location of the third standard cell alongthe vertical direction to reduce the gap height.
 10. The method of claim1, wherein the first standard cell comprises a one-fin layout and thesecond standard cell comprises a two-fin layout.
 11. A method,comprising: scanning a circuit layout design to identify a plurality ofvertical cell regions, wherein each vertical cell region comprises aplurality of standard cells arranged in a vertical direction, andwherein each standard cell has a height extending in the verticaldirection and a width extending in a horizontal direction; scanning thecircuit layout design to identify a first pin connector of a firststandard cell of a first vertical cell region, wherein the first pinconnector is electrically coupled to an active region extending in thehorizontal direction; scanning the circuit layout design to identify asecond pin connector of a second standard cell of a second vertical cellregion, wherein the first and second vertical cell regions are adjacentto each other, and wherein the second pin connector is electricallycoupled to the active region; determining a distance between the firstand second pin connectors; and reducing the distance between the firstand second pin connectors, wherein reducing the distance comprisesperforming an action on at least one of the first and second standardcells.
 12. The method of claim 11, further comprising identifying athird pin connector of a third standard cell of the first vertical cellregion, wherein a power supply line electrically connecting the secondand third pin connectors extends in the vertical direction.
 13. Themethod of claim 12, further comprising reducing an other distancebetween the first and third pin connectors, wherein reducing the otherdistance comprises moving the third standard cell along the verticaldirection.
 14. The method of claim 11, wherein performing the actioncomprises rotating the first standard cell around an axis of symmetry ofthe first standard cell.
 15. The method of claim 11, wherein performingthe action comprises rotating the second standard cell around an axis ofsymmetry of the second standard cell.
 16. A method, comprising: scanninga vertical cell region of a circuit layout design to determine a firstplurality of standard cells having a two-fin structure layout and asecond plurality of standard cells having a one-fin structure layout,wherein the first and second pluralities of standard cells are arrangedin a vertical direction; identifying a first pin connector of a firststandard cell from the first plurality of standard cells; identifying asecond pin connector of a second standard cell from the second pluralityof standard cells, wherein a distance between the first and second pinconnectors extends in the vertical direction; and moving the first orsecond standard cell along the vertical direction to reduce thedistance.
 17. The method of claim 16, further comprising: scanning another vertical cell region adjacent to the vertical cell region;identifying a third pin connector of a third standard cell of the othervertical cell region; determining an other distance between the firstand third pin connectors, wherein the other distance extends in ahorizontal direction; and reducing the other distance, wherein reducingthe other distance comprises performing an action on the third standardcell.
 18. The method of claim 17, wherein performing the actioncomprises rotating the third standard cell around an axis of symmetry ofthe third standard cell.
 19. The method of claim 16, wherein moving thefirst or second standard cell comprises abutting the first and secondstandard cells with each other in the vertical direction.
 20. The methodof claim 16, further comprising electrically coupling the first pinconnector to the third pin connector.